首次加入EVU极紫外光刻!台积电二代7nm+工艺已量产

台积电官方宣布,已经开始批量生产7nm N7+工艺,这是台积电第一次、也是行业第一次量产EUV极紫外光刻技术,意义非凡,也领先Intel、三星一大步。

台积电表示,7nm+ EVU工艺的良品率已经提高到和初代7nm同样的水平,将今年带动7nm工艺芯片的产能显著提升。

台积电预计2019年的总产能折合可达1200万块300mm晶圆,其中7nm工艺的会有100万块,比去年猛增150%。

根据此前消息,华为麒麟985将率先应用台积电7nm+ EUV工艺,有望用于Mate 30系列。尽管遭遇美国限令,但是台积电方面已经明确表示,至少目前不会停止向华为供货。

另外,苹果的A13也已经锁定台积电7nm+,今年的新iPhone就靠它了。

台积电还透露,正稳步推进下一代5nm工艺,全面应用EUV技术,已经开始风险性试产,预计2020年第一季度量产。

位于台湾南部科技园的新工厂Fab 18已经开始设备搬迁与安装,将在明年投产时直接上马5nm,并为未来的3nm工艺做好准备。

另外台积电还有个过渡性质的6nm工艺,基于7nm改进而来,预计2020年第一季度试产,非常适合现有7nm工艺用户直接升级。

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